The article presents the development results of beryllium ions source and other metals intended for the development of the technological cycle of manufacturing infrared radiation receivers for night vision devices and missile guidance systems. The design
- Authors
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Volodymyr Baturin
Institute of Applied Physics of the National Academy of Sciences of Ukraine
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Peter Litvinov
Institute of Applied Physics of the National Academy of Sciences of Ukraine
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Sergey Pustovoitov
Institute of Applied Physics of the National Academy of Sciences of Ukraine
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Oleg Roenko
Institute of Applied Physics of the National Academy of Sciences of Ukraine
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- Keywords:
- Array, Array, Array, Array, Array, Array
- Abstract
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The article presents the development results of beryllium ions source and other metals intended for the development of the technological cycle of manufacturing infrared radiation receivers for night vision devices and missile guidance systems. The design of a plasma spray source of metal ions with a reflective discharge type and a cold hollow cathode, and on its basis a metal ion injector is proposed and developed. A compact source of metal/gas ions has been created in which by argon ion spraying of the cathode and anticathode electrode the formation of the phase of excess pressure of metal vapors is ensured and its ionization by oscillating electrons in the longitudinal magnetic field is realized. Extraction and formation of the beam containing ions of plasma-forming gas and metal is carried out through the emission hole in the anticathode.
The partial ratio of argon/metal ions in the formed beam is in the range of 3−20. The developed source has high ion current stability over time, easy to maintain, can generate ions from any conductive solid without using a high temperature furnace to evaporate.
Modeling and fabrication of the ion-optical system of ion beam formation as a part of the implanter of the Institute of Applied Physics of the National Academy of Sciences of Ukraine is carried out. Since the ion injector will be introduced into the ion implanter МВР-202 company «BALZERS» of the Institute of Semiconductor Physics of the National Academy of Sciences of Ukraine V.Ye. Lashkaryova, an analysis of its optical and vacuum systems, as well as batteries is carried out. All these factors were taken into account during the development of the ion source, which will allow it to be seamlessly implemented in the МВР-202 implanter.
- Author Biography
- References
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Ткачов В.В., Камінський В.В., Степанов Г.С., Оріховський П.В. Погляди на організацію протиповітряної оборони в сучасних умовах. Наука і оборона. 2021. № 4. С. 13—16. DOI: https://doi.org/10.33099/2618-1614-2021-17-4-13-16
Гринченко Л.Я., Пономаренко В.П., Филачёв А.М. Современное состояние и перспективы инфракрасной фотоэлектроники. Прикладная физика. 2009. № 2. С. 57—64.
Саенко В.А. Устройство термоионного осаждения (обзор). ПТЭ.1985. № 3. С. 9—21.
Потемкин Г.В., Лигачев А.Е. Генератор многокомпонентной плазмы, получаемой катодным распылением. Взаимодействие излучений с твердым телом: 7-я Межд. конф. 26−28 сентября. 2007. Минск. Беларусь.
Браун Я. Физика и технология источников ионов. М.: Мир. 1998. 496 с.
Плешивцев Н.В. Катодное распыление. М.: Атомиздат. 1968. 347 с.
Gersch, H.-U. & Wittmaack, K. Postionization of sputtered neutrals by focused electron beam. J. of Vacuum Science and Technology A. 1993. Vol. 11. No. 1. Pp. 125—135. DOI: https://doi.org/10.1116/1.578278
Батурин В.А., Литвинов П.А., Пустовойтов С.А., Роенко О.Ю. Термализация и ионизация атомов рабочей среды в металлическом ионно-распылительном источнике. ВАНТ. 2021. № 6(136). С. 99—102. https://doi.org/10.46813/2021-134-099.
http://ibsimu.sourceforge.net.
Литвинов П.А., Батурин В.А., Пустовойтов С.А. Разработка и исследование источника ионов металлов для технологических ускорительных установок. Ж-л техн. физики. 2014. Т. 84. Вып. 4. C. 126—131.
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- Published
- 2022-12-31
- Section
- TARGET ACQUISITION & SIGHTING SYSTEMS
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Copyright (c) 2022 Володимир Батурін ,Петро Литвинов ,Сергій Пустовойтов ,Олег Роєнко

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